Drawing apparatus, and method of manufacturing article
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United States of America Patent
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Apr 1, 2014
Grant Date -
Mar 14, 2013
app pub date -
Sep 7, 2012
filing date -
Sep 12, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a drawing apparatus including a generation device configured to generate drawing data, a blanking device configured to blank a beam, and a blanking controller includes a first storage device, a second storage device, and a third storage device configured to respectively store the drawing data generated by the generation device, and being configured to control operations of the first storage device, the second storage device, and the third storage device so that an operation of storing the drawing data generated by the generation device in a selected one of the first storage device and the second storage device, and an operation of reading out the drawing data stored in the other of the first storage device and the second storage device, and storing the readout drawing data in the third storage device are executed in parallel.
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