Charged particle beam drawing apparatus, and method of manufacturing article
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United States of America Patent
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Apr 1, 2014
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N/A
app pub date -
Jul 17, 2012
filing date -
Aug 12, 2011
priority date (Note) -
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Abstract
A charged particle beam drawing apparatus includes an electrostatic lens including an electrode member and configured to project the plurality of charged particle beams onto the substrate via the electrode member. In the electrode member are formed a plurality of first openings via which the plurality of charged particle beams pass, and a plurality of second openings different from the plurality of first openings, a total area of the plurality of second openings being not smaller than a total area of the plurality of first openings.
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