Transport apparatus, position teaching method, and sensor jig
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United States of America Patent
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Apr 1, 2014
Grant Date -
Jun 2, 2011
app pub date -
May 19, 2009
filing date -
May 27, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52).
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