Heat equalizer and organic film forming apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8691017
APP PUB NO 20110041768A1
SERIAL NO

12934190

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A heat equalizer includes a container structure having a heating block in which a working fluid is held for heating and vaporizing a material to be heated, a heater placed at the bottom of the container structure, and a material feed pipe allowing the outside and the inside of the container structure to communicate with each other. In the heating block, as a flow path in which the material to be heated flows, a main header pipe connected to the material feed pipe and extending in the horizontally, and a riser pipe branching from the main header pipe and extending vertically are formed. As a condensation path in which the working fluid is cooled and condensed, condensation holes formed respectively on the opposite sides of the riser pipe and extending horizontally, and a condensation pit formed under the riser pipe are formed. Between the condensation holes and the condensation pit, the main header pipe is placed.

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Patent Owner(s)

  • TOHOKU UNIVERSITY;TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kitano, Masafumi Sendai, JP 21 239
Ohmi, Tadahiro Sendai, JP 798 13051
Yamada, Yoshihito Minato-ku, JP 44 141
Yamakage, Hisaaki Minato-ku, JP 14 130

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