Heated rotary seal and bearing for chilled ion implantation system
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United States of America Patent
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-
Apr 8, 2014
Grant Date -
Dec 1, 2011
app pub date -
May 26, 2011
filing date -
May 28, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
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