Micromirror unit and method of making the same
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United States of America Patent
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Apr 8, 2014
Grant Date -
May 3, 2012
app pub date -
Dec 23, 2011
filing date -
Apr 26, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
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