Z-axis capacitive accelerometer
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United States of America Patent
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Apr 22, 2014
Grant Date -
May 24, 2012
app pub date -
Jul 12, 2011
filing date -
Nov 19, 2010
priority date (Note) -
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Abstract
A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.
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