Importance

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Abstract

A substrate handling robot having a robot body and a robot arm with an end effector is configured to exhibit angular (θ), radial (R) and Z motion. A pair of coaxial shafts link the robot arm to respective motors dedicated to angular (θ) and radial (R) motions. The motors are stationarily mounted with respect to the robot body. The shafts are rotatably supported by a floating platform which is motivated in the Z direction by a third motor also stationarily mounted with respect to the robot body. The third motor is coupled to the platform by a Z motion linkage. The first and second motors are coupled to the coaxial shafts by angular and radial motion linkages each of which includes primary and secondary timing belts whose relative motions are synchronized with the Z motion linkage to achieve controllable independent angular (θ), radial (R) and Z motions in a simple, light-weight package.

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First Claim