Valve for vacuum process
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United States of America Patent
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May 6, 2014
Grant Date -
May 24, 2012
app pub date -
Sep 27, 2011
filing date -
Nov 19, 2010
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided is a valve for vacuum process, including: a first valve body having an inlet port and an outlet port; a sealing unit configured to move forward to and backward from the inlet port so as to have a closed position and an open position; a shaft covered with a bellows, and configured to move the sealing unit between the closed position and the open position; a cover for shielding the bellows from corrosive gas when the sealing unit is in the open position; and a cover guide unit configured to guide the cover to move along the shaft.
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