Device to load TEM sample holders into a vacuum chamber
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United States of America Patent
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May 6, 2014
Grant Date -
Feb 7, 2013
app pub date -
Jul 23, 2012
filing date -
Aug 4, 2011
priority date (Note) -
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Abstract
A device is described that allows for the insertion and removal of a Transmission Electron Microscope (TEM) specimen stage and insertion rod into and out of a vacuum chamber. The device can be configured to accommodate specimen stage and insertion rods manufactured by all TEM producers. The device has a side-entry slot for accepting the cylindrical stage rod and a locking mechanism, such that unwanted contact with the specimen and the specimen stage itself is avoided during entry and exit from the plasma vacuum chamber. The devices hold said specimen stage and insertion rod in position during the process of plasma cleaning in a vacuum chamber.
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