Methods of creating probe structures from a plurality of planar layers

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United States of America Patent

PATENT NO 8723543
APP PUB NO 20120064227A1
SERIAL NO

13273873

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Abstract

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Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. Some embodiments are directed to various designs of cantilever-like probe structures while other embodiments are directed to methods for fabricating probe structures. In some embodiments, methods are used to form probe structures from a plurality of planar multi-material layers wherein each probe structure includes a contact tip, a compliant body, and a bonding material that can be used in bonding the probe to a substrate and wherein the compliant body provides for elastic compression of the probe in a plane of primary motion during use and wherein during formation of the layers a stacking direction of the plurality of layers is perpendicular to the plane of primary motion.

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Patent Owner(s)

Patent OwnerAddress
MICROFABRICA INC7911 HASKELL AVENUE SEATTLE WA 98111-1247

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bang, Christopher A San Diego, US 70 1504
Chen, Richard T Burbank, US 84 1126
Kruglick, Ezekiel J J San Diego, US 37 491
Lembrikov, Pavel B Santa Monica, US 24 403
Smalley, Dennis R Newhall, US 214 7375

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