Semiconductor device and method for producing the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 8, 2014
Grant Date -
Jul 4, 2013
app pub date -
Nov 28, 2012
filing date -
Nov 28, 2012
priority date (Note) -
Withdrawn
status (Latency Note)
Importance
Abstract
A semiconductor device includes a semiconductor substrate; a first insulating film that is formed over the semiconductor substrate; a capacitor that is formed over the first insulating film and is formed by sequentially stacking a lower electrode, a capacitor dielectric film, and an upper electrode; a second insulating film that is formed over the capacitor and has a hole including the entire region of the upper electrode in plan view; and a conductor plug that is formed in the hole and contains tungsten.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully