Force feedback leveling of tip arrays for nanolithography
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United States of America Patent
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Jun 3, 2014
Grant Date -
Jul 7, 2011
app pub date -
Dec 3, 2010
filing date -
Dec 7, 2009
priority date (Note) -
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Abstract
A method of leveling a polymer pen array includes contacting a pen array with a surface and measuring a total force exerted on the surface by the pen array, the pen array being disposed at a first angle with respect to a first axis of the surface and a second angle with respect to a second axis of the surface; tilting one or both of the pen array and the surface to vary the first and second angles of the pen array with respect to the surface; measuring the total force exerted by the tilted pen array on the surface; and repeating the tilting and measuring steps until a global maximum of the total force exerted on the surface by the pen array is measured, thereby determining first and second angles which correspond to a leveled position of the pen array with respect to the surface.
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