Combined motion control system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8751050
APP PUB NO 20080114473A1
SERIAL NO

11927244

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Importance

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Abstract

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An examination and processing machine, in particular a lithography appliance, for use in the semiconductor industry, comprising a machine frame (1), an examination or processing device (5) for a work piece (4), a carriage (3) which is mounted on the machine frame (1) and can hold the work piece (4), a handling device (6) for positioning the work piece (4) on the carriage (3) and for removing it from the carriage (3), a series of oscillation isolators (2) for low-oscillation mounting of the machine frame (1), and individual control devices (30, 40, 20) for controlling the carriage (3), the handling device (6) and the oscillation isolators (2). These control devices (20, 30, 40) are subordinate to an overall control device (50), which acts as a host system, via a real-time bus (60).

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First Claim

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Patent Owner(s)

Patent OwnerAddress
INTEGRATED DYNAMICS ENGINEERING GMBHHERMANNSTRASSE 9-13 65479 RAUNHEIM 65479

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heiland, Peter Raunheim, DE 48 390

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