Miniature high sensitivity pressure sensor
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United States of America Patent
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Jun 17, 2014
Grant Date -
Sep 13, 2012
app pub date -
Mar 8, 2012
filing date -
Mar 9, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
There is described a miniature fiber optic pressure sensor design where sensitivity around specific biased pressure is optimized. In an embodiment, the pressure sensor is a Fabry-Perot (FP) sensor which comprises a substrate; and a diaphragm mounted on the substrate. The diaphragm has a center and comprises: a first layer comprising a first material; and a second layer comprising a second material. The second layer forms a dot or a ring. The dot or ring is mounted on the first layer and is centered about the center of the diaphragm. The second material comprises internal pre-stresses to cause the center of the diaphragm (in the case of a dot) or the peripheral area about the center of the diaphragm (in the case of a ring) to camber away from the substrate upon relaxing the internal pre-stresses.
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