Removable compartments for workpiece stocker
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United States of America Patent
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Jun 17, 2014
Grant Date -
Sep 29, 2011
app pub date -
Jun 2, 2011
filing date -
Nov 15, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.
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