Resonator element, resonator, and oscillator
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United States of America Patent
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Jun 24, 2014
Grant Date -
Jan 12, 2012
app pub date -
Jul 5, 2011
filing date -
Jul 9, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A resonator element includes: at least one resonating arm extending, wherein the resonating arm has a mechanical resonance frequency which is higher than a thermal relaxation frequency thereof, the resonating arm has a groove portion, the groove portion includes a bottom portion, a first side surface that extends along the longitudinal direction of the resonating arm and comes into contact with the opened principal surface and the bottom portion, and a second side surface that faces the first side surface with the bottom portion disposed therebetween and comes into contact with the opened principal surface and the bottom portion, and the groove portion has a non-electrode region which extends from a part of the first side surface close to the bottom portion to a part of the second side surface close to the bottom portion and in which no electrode is provided.
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