Arrangement and method to sense flow using mechanical stress microsensors
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United States of America Patent
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Jul 1, 2014
Grant Date -
Nov 20, 2008
app pub date -
Jul 29, 2008
filing date -
Sep 13, 2005
priority date (Note) -
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Abstract
A sensor module includes a MEMs sensor device and a processing circuit. The MEMs sensor device is operable to determine a fluid flow induced mechanical force on a first flow control device connective element. The processing circuit is operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force. The processing circuit is configured to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.
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