Thin film device with minimized spatial variation of local mean height
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United States of America Patent
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Jul 1, 2014
Grant Date -
Jun 4, 2009
app pub date -
Nov 30, 2007
filing date -
Nov 30, 2007
priority date (Note) -
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Abstract
This invention provides a thin film device with minimized spatial variation of local mean height. More specifically, the thin film device has a substrate and at least one first structure having a first spatially varying weighted local mean height determined by a layer weighting function. The first structure has a first maximum height, a first minimum height and a first variation for a given averaging area. A compensation structure is also provided upon the substrate, the compensation structure having a second spatially varying weighted local mean height determined by the layer weighting function. The compensation structure also has a second maximum height, a second minimum height and a second variation for the given averaging area. The first structure and compensation structure combine to provide a combined structure upon the substrate with minimized spatial variation of a combined weighted local mean.
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