Carrier film for mounting polishing workpiece and method for making the same
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United States of America Patent
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Jul 1, 2014
Grant Date -
Feb 24, 2011
app pub date -
Oct 19, 2010
filing date -
Feb 15, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to a carrier film for mounting a polishing workpiece. The carrier film comprises a surface substrate and a buffer substrate. The surface substrate consists of first elastomer, the first elastomer comprising a plurality of first holes; wherein the first holes have a drop shape, and each of the first holes has an opening. The buffer substrate consists of second elastomer, the second elastomer comprising a plurality of second holes. The surface substrate and the buffer substrate are adhered with adhesive comprising the first or the second elastomer. A method for making the carrier film is also provided. When polishing, the carrier film provides a good buffer property to conduct and release down force applied on the polishing workpiece.
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