Method and device for synthesizing panorama image using scanning charged-particle microscope
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United States of America Patent
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Jul 1, 2014
Grant Date -
Jul 28, 2011
app pub date -
Sep 2, 2009
filing date -
Sep 11, 2008
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Abstract
Provided is a panorama image synthesis technique using a scanning charged-particle microscope and capable of obtaining a panorama image synthesis that is robust against contamination and the imaging shift and distortion of an image in a wide-field imaging region (EP) for semiconductor fine patterns. The panorama image synthesis technique in the wide-field imaging region (EP) using the scanning charged-particle microscope is characterized in that the layout of each adjustment point, each local imaging region, and an imaging sequence comprising the imaging order of the each adjustment point are optimized and created as an imaging recipe.
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