Inspection system utilizing solid immersion lenses
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United States of America Patent
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Jul 1, 2014
Grant Date -
Apr 19, 2012
app pub date -
Oct 15, 2010
filing date -
Oct 15, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.
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