Electromechanical transducer and photoacoustic apparatus
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United States of America Patent
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Jul 1, 2014
Grant Date -
Oct 18, 2012
app pub date -
Mar 15, 2012
filing date -
Apr 14, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides an electromechanical transducer which can prevent light from being incident on a receiving face, without deteriorating mechanical characteristics of a vibration film. The electromechanical transducer has at least one cell 2 in which the vibration film 7 containing one electrode 8 out of two electrodes 3 and 8 that are provided so as to interpose a space 5 therebetween is vibratably supported. The electromechanical transducer has a stress relaxation layer 9 formed on the vibration film 7, which has an acoustic impedance matching that of the vibration film 7, and has a light reflection layer 6 formed on the stress relaxation layer 9.
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