Multi-region processing system

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United States of America Patent

PATENT NO 8770143
APP PUB NO 20110209663A1
SERIAL NO

13106059

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Abstract

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The various embodiments of the invention provide for relative movement of the substrate and a process head to access the entire wafer in a minimal space to conduct combinatorial processing on various regions of the substrate. The heads enable site isolated processing within the chamber described and method of using the same are described.

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Patent Owner(s)

Patent OwnerAddress
INTERMOLECULAR INCSAN JOSE CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Indranil Mountain View, US 120 1081
Endo, Rick San Carlos, US 14 149
Tsung, James Milpitas, US 34 550
Weiner, Kurt San Jose, US 35 557
Zhao, Maosheng San Jose, US 27 1312

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