Conductive element for electrically coupling an EUVL mask to a supporting chuck
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United States of America Patent
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Jul 8, 2014
Grant Date -
Mar 28, 2013
app pub date -
Sep 20, 2012
filing date -
Sep 27, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A coupling module may include an upper portion that defines an aperture, mask contact elements, chuck contact elements and an intermediate element that is connected between the mask contact elements and the upper portion. A shape and a size of the aperture may correspond to a shape and size of a pattern transfer area of an extreme ultra violet (EUVL) mask. The coupling module may be shaped and sized so that once the mask contact elements contact the upper portion of the EUVL mask, the chuck contact elements contact a chuck that supports the mask. The coupling module may further provide at least one conductive path between the upper portion of the EUVL mask and the chuck when the EUVL mask is positioned on the chuck.
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