Conical sponge brush for cleaning semiconductor wafers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8778087
APP PUB NO 20130255720A1
SERIAL NO

13803211

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush including a first end, a second end opposed to the first end, an outer surface, and a hollow bore defined in the brush about a central axis of the brush. The brush defines a first cross-sectional area near the first end and a second cross-sectional area near the second end. Both the first and second cross-sectional areas are generally perpendicular to the central axis and the second cross-sectional area is greater than the first cross-sectional area.

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Patent Owner(s)

  • ILLINOIS TOOL WORKS INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tyrrell, Jeffrey J West Berlin, US 4 27
Withers, Bradley S El Dorado Hills, US 10 60

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