No-contact wet processing tool with site isolation
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United States of America Patent
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Jul 22, 2014
Grant Date -
Oct 11, 2012
app pub date -
Apr 7, 2011
filing date -
Apr 7, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Embodiments of the current invention describe a substrate processing tool. The substrate processing tool includes a housing defining a chamber, a substrate support, a container, and an impelling mechanism. The substrate support is coupled to the housing and configured to support a substrate within the chamber. The container is coupled to the housing within the chamber and configured to hold a liquid. The container is below and spaced apart from the substrate. The impelling mechanism is coupled to the housing and configured to apply a force to the liquid within the container such that an impelled portion of the liquid contacts a lower surface of the substrate.
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