Method for forming a thin-film lithium-ion battery
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United States of America Patent
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Jul 22, 2014
Grant Date -
Mar 31, 2011
app pub date -
Sep 8, 2010
filing date -
Sep 28, 2009
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Abstract
A method for forming a lithium-ion type battery including the steps of forming, over an at least locally conductive substrate, an insulating layer having a through opening; successively and conformally depositing a stack comprising a cathode collector layer, a cathode layer, an electrolyte layer, and an anode layer, this stack having a thickness smaller than the thickness of the insulating layer; forming, over the structure, an anode collector layer filling the space remaining in the opening; and planarizing the structure to expose the upper surface of the insulating layer.
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