Process for producing liquid ejection head

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United States of America Patent

PATENT NO 8784591
APP PUB NO 20130220522A1
SERIAL NO

13760280

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Abstract

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A process for producing a liquid ejection head includes a provision step of providing a piezoelectric substrate, and a first and a second support substrate for supporting the piezoelectric substrate; a bonding step of bonding one surface of the first support substrate to one principal surface of two principal surfaces of the piezoelectric substrate; a groove forming step of forming a groove in the other principal surface of the two principal surfaces of the piezoelectric substrate; an electrode forming step of forming a first electrode on at least one surface of a lateral surface of the groove, a bottom surface of the groove and the other principal surface remaining after the groove is formed; a joining step of joining one surface of the second support substrate to the other principal surface of the piezoelectric substrate; and a separation step of separating the first support substrate from the piezoelectric substrate.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Shinan Kashiwa, JP 35 164

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