Table for receiving a workpiece and method for processing a workpiece on such table

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United States of America Patent

PATENT NO 8785812
SERIAL NO

11597856

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Abstract

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The present invention relates to a device for the treatment of a workpiece, in particular of a substantially flat substrate, comprising a table (2) for supporting the workpiece (5), a flow generation apparatus (6, 11) producing a gas flow (22) on a top face (17.1, 17.2) of the table (2) in a region between the workpiece (5) and the top face (17.1, 17.2) of the table (2), on which gas flow the workpiece (5) is supported during the treatment.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON SOLAR AG TRUEBBACHSWISS TE LUI BACH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Büchel, Arthur Ruggell, LI 5 11
Grundmüller, Richard Münich, DE 2 143
Meier, Johannes Corcelles, CH 26 203

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