Three-dimensional filter enables adaptive focus sensing
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United States of America Patent
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Jul 22, 2014
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N/A
app pub date -
Jan 10, 2013
filing date -
Jan 10, 2013
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Abstract
This focus sensor is readily usable in a system using pupil obscuration to measure the state of focus of a light beam. A scattering volumetric filter modifies a three-dimensional wavefront so that focus can be detected by a two-dimensional detector for conversion to a one-dimensional signal having values of plus, zero and minus. This diffusing filter comprises sub wavelength particles having a high index of refraction suspended in an adhesive to produce a solid diffuser. This focus sensor enables a well-behaved focus curve having a constant slope near best focus, while maintaining a slope that is either constant or monotonic at a minimal rate over an extended distance to support a long capture-range over which a focus-controlling servo-mechanism can acquire and maintain focus in the presence of corrupting target surface topography or optical defects.
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