Method and apparatus for measurement of exit pupil transmittance
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United States of America Patent
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Jul 22, 2014
Grant Date -
Jan 13, 2011
app pub date -
Feb 9, 2010
filing date -
Apr 14, 2004
priority date (Note) -
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Abstract
A method and apparatus for determining the state of the lens transmittance of an optical projection system are described. A lens or imaging objective transmission is determined as a function of exit pupil transverse direction cosine (nx,ny) at multiple field points thereby providing a more complete analysis and correction of a photolithographic exposure system. The entrance pupil of a projection imaging system is uniformly illuminated and the angular dependence of transmission through the imaging system as a function of exit pupil direction cosines is determined. The illumination source includes a light conditioner with an in-situ illumination structure (ISIS), which is an optical structure that can provide uniform illumination of the system's entrance pupil.
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