Drawing apparatus, and method of manufacturing article
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United States of America Patent
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Jul 29, 2014
Grant Date -
Jun 19, 2014
app pub date -
Dec 13, 2013
filing date -
Dec 19, 2012
priority date (Note) -
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Abstract
The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, the apparatus including a first member in which an aperture, through which the charged particle beam passes, is formed, a chamber including a first space and a second space which are partitioned by the first member, and a removing device including a first supply device configured to supply a first gas containing unsaturated hydrocarbon to the first space and a second supply device configured to supply a second gas containing ozone to the second space, and configured to remove contamination on the first member by active species generated by reaction of the first gas with the second gas.
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