Optical module and spectroscopic analyzer

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United States of America Patent

PATENT NO 8792101
APP PUB NO 20120194821A1
SERIAL NO

13357749

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A colorimetric sensor includes an etalon including a first substrate, a second substrate facing the first substrate, a fixed mirror formed on a surface of the first substrate facing the second substrate, and a movable mirror formed on the second substrate so as to face the fixed mirror with a prescribed gap therebetween, a light receiving element that receives a test subject light having passed through the etalon, and a holding member holding the etalon. The etalon includes a light interference area facing the first and second substrates in a plan view as seen in a thickness direction of the substrate, and a protruding area protruding from the light interference area. The holding member holds the etalon at one end side of the protruding area opposite to the light interference area.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nozawa, Takeshi Suwa, JP 27 432

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