Variable wavelength interference filter, optical module, and optical analysis device
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United States of America Patent
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Aug 5, 2014
Grant Date -
Jun 14, 2012
app pub date -
Dec 7, 2011
filing date -
Dec 8, 2010
priority date (Note) -
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Abstract
A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.
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