Piezoelectric element, piezoelectric actuator, liquid ejecting head, liquid ejecting apparatus, and method for producing piezoelectric element

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United States of America Patent

PATENT NO 8801152
APP PUB NO 20130300806A1
SERIAL NO

13940123

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Abstract

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A piezoelectric element includes a substrate; a first conductive layer disposed on or above the substrate; a piezoelectric layer covering a top and a side of the first conductive layer; a relaxing layer disposed on or above the piezoelectric layer and along an edge of a top surface of the piezoelectric layer; and a second conductive layer covering at least the relaxing layer and the piezoelectric layer.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakayama, Masao Shiojiri, JP 118 851

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