Importance

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Abstract

Pick and place tape release techniques and tools that allow thin, fragile semiconductor dies to be removed from wafer tape with reduced tape release forces applied to the semiconductor dies. For example, a method for removing semiconductor die from wafer tape includes mounting a wafer ring having wafer tape and one or more dies attached to the wafer tape, and aligning an ejector pin assembly under a target die to be removed from the wafer tape. The ejector pin assembly includes a vacuum housing, an ejector pin, a suction plate, and an aperture formed in the suction plate in alignment with the ejector pin. A vacuum is generated in the vacuum housing to draw the tape against a surface of the suction plate. The ejector pin is extended through the vacuum housing out from the aperture of the suction plate to push against a backside of the target die and release the tape from the backside of the target die, and as the tape is released from the backside of the target die, the tape is drawn down against the suction plate by suction force of the vacuum.

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First Claim