Tilt structure
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United States of America Patent
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-
Aug 12, 2014
Grant Date -
Oct 6, 2011
app pub date -
Mar 25, 2011
filing date -
Apr 5, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A tilt structure includes a shaft section formed on a substrate section, a tilt structure film having one end formed on an upper surface of the shaft section, and the other end bonded to the substrate section, and a thin film section provided to the tilt structure film, located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section, and having a film thickness thinner than the tilt structure film, the tilt structure film is bent in the thin film section, and an acute angle is formed by the substrate section and the tilt structure film.
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