Inspection system by charged particle beam and method of manufacturing devices using the system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8803103
APP PUB NO 20140034831A1
SERIAL NO

13732897

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Abstract

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An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

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Patent Owner(s)

  • EBARA CORPORATION;TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatakeyama, Masahiro Kanagawa, JP 111 2104
Karimata, Tsutomu Kanagawa, JP 67 1864
Kimba, Toshifumi Kanagawa, JP 89 1796
Murakami, Takeshi Tokyo, JP 270 5244
Nagahama, Ichirota Kanagawa, JP 32 541
Nagai, Takamitsu Kanagawa, JP 22 716
Nakasuji, Mamoru Kanagawa, JP 144 2835
Noji, Nobuharu Kanagawa, JP 107 2599
Oowada, Shin Kanagawa, JP 33 1082
Saito, Mutsumi Kanagawa, JP 45 1198
Satake, Tohru Kanagawa, JP 99 2348
Sobukawa, Hirosi Kanagawa, JP 54 1764
Watanabe, Kenji Kanagawa, JP 537 8338
Yamazaki, Yuichiro Tokyo, JP 89 1553
Yoshikawa, Shoji Tokyo, JP 89 2332

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