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Abstract

A substantially planar eddy-current sensor having durability enhancing pillars in an active region is provided. The pillars are distributed and sized so as to have limited effect on the sensor's performance. When the sensor is mounted on a component such that the sensor experiences forces on a top and bottom surface, the pillars bear the load reducing the load bore by the active elements (e.g., drive winding, sense elements). A sensor with redundant drive windings and/or redundant sense elements is disclosed. The redundant elements may be connected to separate electronics. Another aspect relates to providing a reference transformer for calibration of a sensor. The secondary windings of the reference transformer are connected in series with the sense elements of the sensor to be calibrated. Transimpedance measurements are made when the drive winding of the reference transformer is excited. The measurements are used to correct transimpedance measurements made when the drive winding of the sensor is excited. A system having an impedance analyzer and a plurality of multiplexing units is disclosed for monitoring a plurality of sensor. Each multiplexing units directs an excitation signal to the drive winding of a respective sensor and returns, serially, the sense element responses back to the impedance analyzer. The system coordinates the excitation of each sensor and return of the sensor response to share a serial network. The multiplexing units may have a reference transformer for calibration of their respective sensors. Optical communication may be used.

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First Claim