Magnetic supporting mechanism having a movable magnet with a varying width, exposure apparatus with the magnetic supporting mechanism, and device manufacturing method thereof
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United States of America Patent
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Aug 12, 2014
Grant Date -
May 12, 2011
app pub date -
Oct 29, 2010
filing date -
Nov 11, 2009
priority date (Note) -
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Abstract
A magnetic supporting mechanism which comprises first to fourth magnets having first to fourth magnetic poles, in which the third magnet is partially inserted into a gap between the first and second magnets so that the first and third magnetic poles face each other and the second and fourth magnetic poles face each other, and which supports a supporting target to be movable in a second direction, in which the third magnet is inserted, of two directions perpendicular to a first direction in which the first and second magnetic poles face each other, wherein the third magnet is formed such that an effective width across which a magnetic force acts in a third direction perpendicular to both the first and second directions is narrower at a second end thereof opposite to a first end thereof inserted between the first and second magnets than at the first end.
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