Method for imprint lithography utilizing an adhesion primer layer

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United States of America Patent

PATENT NO 8808808
APP PUB NO 20070212494A1
SERIAL NO

11734542

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Abstract

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The invention provides a method of applying an adhesion primer layer for an imprint lithography process that includes contacting a fluid with a surface of a substrate in a coating process and initiating a chemical reaction that forms a covalent bond between a component in the fluid and the surface of the substrate such that an adhesion primer layer is adhered to the surface of the substrate. A polymeric layer may be adhered to the surface of the substrate coated with the adhesion primer layer. The method allows adhesion primer coating for double-sided imprinting applications including patterned magnetic media.

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Patent Owner(s)

  • MOLECULAR IMPRINTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fletcher, Edward Brian Austin, US 45 320
Sreenivasan, Sidlgata V Austin, US 209 5390
Xu, Frank Y Round Rock, US 157 2302

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