Method for integrated circuit diagnosis

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United States of America Patent

PATENT NO 8809074
APP PUB NO 20130295700A1
SERIAL NO

13935726

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Abstract

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A method provides a mechanism to examine physical properties and/or diagnose problems at a selected location of an integrated circuit. Such a method can include creating a layer of a reactive material a selected distance above and in proximity with a surface of the integrated circuit so that the reactive material can be evaluated to form chemical radicals above and in proximity to the surface of the integrated circuit. A portion of the reactive material can be excited. A portion of the surface of the integrated circuit can be removed to a selected level to evaluate an exposed electrical structure of the integrated circuit. The exposed electrical structure can be evaluated to determine a potential problem in the integrated circuit.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arrington, Justin R Boise, US 12 138
Sandhu, Gurtej S Boise, US 1217 32397
Williamson, Mark J Boise, US 43 857

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