Acoustic wave device and method for fabricating the same
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United States of America Patent
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Aug 19, 2014
Grant Date -
Sep 2, 2010
app pub date -
May 17, 2010
filing date -
Mar 2, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
A surface acoustic wave device includes a piezoelectric substrate, at least one interdigital transducer (IDT) electrode provided on the piezoelectric substrate, and an insulator layer to improve a temperature characteristic arranged so as to cover the IDT electrode. When a surface of the insulator layer is classified into a first surface region under which the IDT electrode is positioned and a second surface region under which no IDT electrode is positioned, the surface of the insulator layer in at least one portion of the second surface region is higher than the surface of the insulator layer from the piezoelectric substrate in at least one portion of the first surface region by at least about 0.001λ, where the wavelength of an acoustic wave is λ.
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