Piezoelectric devices and methods for manufacturing piezoelectric substrates used in such devices
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United States of America Patent
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Aug 19, 2014
Grant Date -
Apr 26, 2012
app pub date -
Oct 14, 2011
filing date -
Oct 20, 2010
priority date (Note) -
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Abstract
In a piezoelectric device, a piezoelectric substrate includes a vibrating piece with respective excitation electrodes on each principal surface thereof. The piezoelectric substrate is surrounded by an outer frame separated therefrom by a through-void except for a supporting portion connecting the vibrating piece to the frame. Extraction electrodes extend from the excitation electrodes across the supporting portion to the frame, and on edge surfaces of the supporting portion. The piezoelectric substrate is sandwiched between a lid and a package base to form a piezoelectric device. The outer surface of the package base is a mounting surface to which the extraction electrodes extend via an edge surface of the through-void in a region that does not overlap the excitation electrode.
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