Control apparatus and measuring apparatus
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United States of America Patent
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Aug 19, 2014
Grant Date -
Jul 5, 2012
app pub date -
Dec 29, 2011
filing date -
Jan 5, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A control apparatus for controllably driving a drive mechanism which displaces a movable member, includes: an electric-current detecting unit configured to detect electric current for driving the drive mechanism; a speed control unit configured to set a target electric-current according to a drive speed at which the drive mechanism is caused to drive the movable member; and an electric-current control unit configured to multiply, by an integral gain and a proportional gain, an electric-current deviation between a target electric-current and a detection electric-current detected by the electric-current detecting unit to set output electric-current to be output to the drive mechanism, wherein the current control unit changes at least one of the integral gain and the proportional gain according to the drive speed of the drive mechanism.
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