Trapping device that traps particles in vacuum atmosphere

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United States of America Patent

PATENT NO 8814970
APP PUB NO 20110186082A1
SERIAL NO

13020357

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Abstract

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A trapping device that traps a particle in a vacuum atmosphere includes a plurality of grooves arrayed on a surface of the trapping device. Each of the plurality of grooves has a shape that is obtained by replacing a bottom part of a U-groove is replaced with a V-groove.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yonekawa, Masami Tsukuba, JP 23 214

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