Carbon nanotube synthesizing apparatus

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United States of America Patent

PATENT NO 8815168
APP PUB NO 20130259763A1
SERIAL NO

13791960

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A carbon nanotube synthesizing apparatus in which the state of generated plasma can be stabilized is provided. A carbon nanotube synthesizing apparatus 1 comprises a chamber 2, an antenna 3 including a tip 3a, a microwave conductor 4, a gas introducing unit 5, a gas discharging unit 6, a substrate holding unit 7, and a heating unit 8. The shape of the inner wall of the chamber 2 is symmetrical with respect to the tip 3a of the antenna 3.

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Patent Owner(s)

  • HONDA MOTOR CO., LTD.;WASEDA UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kato, Ryogo Saitama, JP 7 31
Kawarada, Hiroshi Tokyo, JP 23 195
Nikawa, Hidefumi Saitama, JP 12 41
Ohashi, Toshiyuki Saitama, JP 52 472
Ohta, Masahiro Saitama, JP 171 705
Tokune, Toshio Saitama, JP 39 613

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