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United States of America Patent

PATENT NO 8816305
APP PUB NO 20130153603A1
SERIAL NO

13330884

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Importance

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Abstract

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An apparatus supplies a target material to a target location. The apparatus includes a reservoir that holds a target mixture that includes the target material and non-target particles; a supply system that receives the target mixture from the reservoir and that supplies the target mixture to the target location, the supply system including a tube and a nozzle that defines an orifice through which the target mixture is passed; and a filter inside the tube through which the target mixture is passed.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL-5504 DR

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baumgart, Peter San Diego, US 12 173
De, Dea Silvia San Diego, US 12 86
Kalynych, Sergei San Diego, US 1 8

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