Compensation of stress effects on pressure sensor components

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United States of America Patent

PATENT NO 8820169
APP PUB NO 20130341740A1
SERIAL NO

13851040

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Abstract

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Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.

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Patent Owner(s)

Patent OwnerAddress
MEASUREMENT SPECIALTIES INC1000 LUCAS WAY HAMPTON VA 23666

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
August, Richard J Concord, US 9 145
Doelle, Michael B Mountain View, US 5 52

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